Microscopy data, code and analysis underlying the publication "Optical STEM detection for scanning electron microscopy"

Raw microscopy data underlying the publication, structured per experiment (figure). The imaging setting that is varied in the experiments (exposure/dwell time, beam current, landing energy) is indicated by the folder or image name. The images may have a data bar indicating the relevant acquisition settings.

For more information on the sample preparation and image acquisition, see the Methodology section in the publication.The code and data analysis notebooks are included in the accompanying Github repository: https://github.com/hoogenboom-group/Kievits-OSTEM-2023

Data set structure:

1_Optimization-OSTEM: contains the images for the landing energy optimization (Figure 2 in the article). Images have a pixel size of 1 nm and where acquired with increments of 500 eV (electron volts). Dwell times are indicated in the folder names. The 'Qualitative' folder contains a subset of these data for ease of plotting Figure 2A.2_Qualitative-comparison: contains qualitative images of rat pancreas and zebrafish larva (Figure 3). Both raw images (with metadata in TIFF header) and cropped images are included (used for publication). Images have a pixel size of 4 nm.3_SNR-comparison-detectors: contains images used for the quantitative comparison of detectors (Figure 4). Contains a folder per detection technique with all the images. The 'Qualitative' folder contains a subset of these data for ease of plotting Figure 4A.4_Image-resolution-detectors: contains raw images and extracted edge widths from FEI Image (Figure 5). The acquisition settings are indicated in the folder names, with one folder per detection technique.5_Current-SNR-relation: contains the images with increasing beam current / fixed dwell time and increasing dwell time / fixed current (Figure 6). The 'Qualitative' folder contains a subset of the data for ease of plotting Figure 6A and 6B.6_Supplementary: contains the supplementary data, used for the background texture analysis. The results in Figure S4 and Table S1 are based on these images.

General acquisition parameters

Pixel size = 1 nm (unless stated otherwise)

Beam current = 0.4nA (unless stated otherwise)

BSD, SE Landing energy = 1.5keV (typically)

OSTEM landing energy = 4keV (typically)

ADF-STEM landing energy = 25keV